METHOD OF MANUFACTURING LARGE AREA GALLIUM NITRIDE SUBSTRATE

摘要

Disclosed is a method of fabricating a large area gallium nitride substrate. disclosed method of fabricating the large area gallium nitride substrate includes the steps of forming a buffer layer on a silicon substrate; forming an insulation layer pattern at an edge of a top surface of the buffer layer; forming a GaN layer on the buffer layer; and simultaneously separating the insulation layer pattern and materials at an upper portion and a lower portion of the insulation layer pattern.