发明名称 VERTICAL-CAVITY SURFACE EMITTING LASER AND MANUFACTURING METHOD FOR THE SAME
摘要 A vertical-cavity surface emitting laser and a method for manufacturing the same are disclosed. The laser includes a substrate, a lower reflection layer on the substrate, an active layer on the lower reflection layer, a sacrificial layer arranged on the first side of the active layer, a stopper which is separated from the sacrificial layer and arranged o the second side facing the first side of the active layer, and an upper reflection layer which is fixed to the sacrificial layer and extended to the active layer and the stopper. The stopper can define the minimum separation distance of an upper reflection mirror and the active layer.
申请公布号 KR20140036789(A) 申请公布日期 2014.03.26
申请号 KR20120103345 申请日期 2012.09.18
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 SONG, HYUN WOO
分类号 H01S5/183 主分类号 H01S5/183
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