发明名称 |
Electrical component comprising a material with perovskite structure and optimised electrodes and method for manufacturing same |
摘要 |
<p>Electrical component comprises a lead-based perovskite crystal material layer between a lower electrode on the surface of a substrate and an upper electrode, where the lower electrode comprises a stabilizing first layer made of a first material and a seeding second layer made of a second material, and the first and second materials have the same chemical composition but different structural parameters and/or densities. Independent claims are also included for: (1) an actuator comprising the electrical component, where the substrate comprises at least one apertured part in order to define a released zone that can deform comprising the layer of perovskite material; and (2) fabricating the component, comprising producing, at a given crystallization temperature, a layer of perovskite material between a lower electrode and an upper electrode, by (a) producing a stabilizing first layer by depositing platinum at a first maximum temperature and (b) producing a seeding second layer by depositing platinum at a second maximum temperature that is below the first temperature and the crystallization temperature of the perovskite material.</p> |
申请公布号 |
EP2530755(B1) |
申请公布日期 |
2014.03.26 |
申请号 |
EP20120168677 |
申请日期 |
2012.05.21 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
CUEFF, MATTHIEU;DEFAY, EMMANUEL;LE RHUN, GWENAEL |
分类号 |
H01L41/047;H01L41/08;H01L41/29 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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