METHOD OF FORMING PATTERN IN LIGHT EMITTING DIODE

摘要

Disclosed is a method for forming a pattern in a light emitting diode capable of improving light extraction efficiency. The method for forming a pattern in a light emitting diode comprises a step for depositing one or more oxide films having a refractive index which is smaller than the refractive index of a light extraction layer on the surface of the light extraction layer; a step for spreading nanostructures on the oxide film; and a step for forming a nanopattern on the surface of the oxide film by etching the nanostructures. The present invention is provided to form the nanostructures in a short time in comparison to an existing nanostructure forming method, without using an electron beam lithography patterning method which requires high manufacturing costs and is difficult to be applied to a large area; apply the method for forming the nanostructures over a large area; and reduce manufacturing costs. [Reference numerals] (25,DD,EE) Substrate (n); (AA) Oxide film deposition; (BB) Nanostructure coating; (CC) ICP etching