发明名称 Semiconductor IC and its manufacturing method, and module with embedded semiconductor IC and its manufacturing method
摘要 A semiconductor IC includes a semiconductor IC main body having a predetermined circuit formed on a main surface, a metal layer selectively provided on substantially the whole back surface of the semiconductor IC main body excluding the periphery. According to the present invention, the metal layer provided on the semiconductor IC main body can dissipate heat at a high level. Because the metal layer is selectively provided, even when the semiconductor IC main body is thinned by polishing, warpage does not occur easily in a wafer state. The metal layer is selectively provided at the center of the back surface of the semiconductor IC. Therefore, a laminate of a semiconductor wafer and a thick metal does not need to be diced. As a result, chipping on the disconnected surface can be prevented effectively.
申请公布号 EP1729341(A3) 申请公布日期 2014.03.26
申请号 EP20060252853 申请日期 2006.06.01
申请人 TDK CORPORATION 发明人 KAWABATA, KENICHI;ABE, HISAYUKI
分类号 H01L23/31;H01L23/00;H01L23/433 主分类号 H01L23/31
代理机构 代理人
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