发明名称 DEVICE FOR PRECISION DISPLACEMENT
摘要 The apparatus has a base (1) on which several piezoelectric material plates (2) are arranged. The piezoelectric material plates are separated by electrodes (3) so as to form a base module (10). The electrodes are connectable to a controlled voltage source, such that change in the form or mass of the plate is occurred when voltage is applied to electrodes. A protective plate (4) is arranged on uppermost electrode.
申请公布号 EP2603941(B1) 申请公布日期 2014.03.26
申请号 EP20110758374 申请日期 2011.06.28
申请人 POTEMKIN, ALEXANDER;LUSKINOVICH, PETR, NIKOLAEVICH;ZHABOTINSKY, VLADIMIR, ALEXANDROVICH 发明人 POTEMKIN, ALEXANDER;LUSKINOVICH, PETR, NIKOLAEVICH;ZHABOTINSKY, VLADIMIR, ALEXANDROVICH
分类号 H01L41/09;H01L41/047;H02N2/02 主分类号 H01L41/09
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