| 发明名称 |
NANOIMPRINT MOLD AND CURVED BODY |
| 摘要 |
<p>The nanoimprint mold for a curved surface of the present invention is characterized by comprising a silicone rubber elastic body having an Hs rubber hardness, in the case of a thickness of 250 µm, of 10 to 55 and by having fine depressions and protrusions formed on the surface. According to the nanoimprint mold for a curved surface of the present invention, a nanoimprint can be formed even on a curved surface.</p> |
| 申请公布号 |
EP2711161(A1) |
申请公布日期 |
2014.03.26 |
| 申请号 |
EP20120785578 |
申请日期 |
2012.05.15 |
| 申请人 |
SOKEN CHEMICAL & ENGINEERING CO., LTD. |
发明人 |
TAKAHASHI, TAKANORI;YAMADA, HIROKO;MIZAWA, TAKAHIDE;KOJIMA, RYOTA |
| 分类号 |
B29C59/02;B29C33/40;H01L21/027 |
主分类号 |
B29C59/02 |
| 代理机构 |
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