| 摘要 |
<p>[Object] A film-coating technique is provided which can make uniform amounts of inflows through all of flow channels communicating with an ejection port, which can minimize the influence of an application gap, and which can coat a film with higher precision than in the past. [Solution] A film-coating nozzle includes branching blocks (3, 4, 5) having a branched channel structure, a tip member (12) having an ejection port formed to be wide in a longitudinal direction, and a tube section (13) including a plurality of tubules (14) having tubule inflow openings (16) that communicate with the branched channel structure, and tubule outflow openings (17) that communicate with the ejection port of the tip member (12). The branching blocks (3, 4, 5) include multiple stages of branching portions (8) each of which provides a chamber to branch a flow channel communicating with an inflow opening (16), and the flow channels branched by the branching portions (8) in the same stage have equal lengths up to outflow openings (17). The tip member (12) has a groove (15) that constitutes the ejection port, and a length (S) of an end surface of the ejection port in a transverse direction is longer than an internal diameter (D) of the tubule outflow openings (17), the tubule outflow openings (17) being disposed at substantially equal intervals in an innermost surface of the groove (15).</p> |
