发明名称 PLASMA IGNITER
摘要 A plasma igniter is disclosed. According to the present invention, the plasma igniter which performs a plasma discharge by being installed in a remote plasma generator includes: a housing which is combined with a mounting part which is formed in the remote plasma generator, has an air circulation opening part formed in a lateral side, and has a vent opening part formed in the upper part; an ignition electrode which is combined with the inside of the housing; and a cooling fan which is installed in the vent opening part of the housing and forcibly discharges the internal air of the housing. According to the forementioned, the present invention is able to extend a lift span, improve durability, and thereby remarkably improve work efficiency by preventing damage by fire which is caused by an overheating by rapidly and forcibly discharging the plasma overheating to the outside by the cooling fan and a heat sink.
申请公布号 KR101375539(B1) 申请公布日期 2014.03.25
申请号 KR20130003450 申请日期 2013.01.11
申请人 TERATECH CO., LTD. 发明人 CHOI, BYUNG CHUN;JANG, DUCK HYUN;LEE, KUK HWAN
分类号 H05H1/24;C23C16/50;H01L21/3065 主分类号 H05H1/24
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