Surface acoustic wave device

摘要

A surface acoustic wave device includes a piezoelectric substrate made of lithium niobate and including grooves in a surface thereof. Each groove includes a finger of an IDT electrode made of copper. The IDT electrode includes a first electrode layer embedded in the grooves and a second electrode layer sticking out of the surface of the piezoelectric substrate. A normalized electrode thickness of the first electrode layer is about 1.0% to about 12.0% inclusive, and the normalized electrode thickness of the second electrode layer is about 1.0% to about 9.0% inclusive. The normalized electrode thickness of the entire IDT electrode is about 6.0% to about 13.0% inclusive.