| 发明名称 |
Method of manufacturing graphene by using germanium layer |
| 摘要 |
A method of manufacturing graphene includes forming a germanium layer on a surface of a substrate, and forming the graphene directly on the germanium layer by supplying carbon-containing gas into a chamber in which the substrate is disposed. |
| 申请公布号 |
US8679976(B2) |
申请公布日期 |
2014.03.25 |
| 申请号 |
US20100976874 |
申请日期 |
2010.12.22 |
| 申请人 |
LEE EUN-KYUNG;CHOI BYOUNG-IYONG;WHANG DONG-MOK;LEE JAE-HYUN;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE EUN-KYUNG;CHOI BYOUNG-IYONG;WHANG DONG-MOK;LEE JAE-HYUN |
| 分类号 |
H01L21/44 |
主分类号 |
H01L21/44 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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