发明名称 Graphene transistor with a self-aligned gate
摘要 A transistor structure is provided which includes a graphene layer located on an insulating layer, a first metal portion overlying a portion of the graphene layer, a second metal portion contacting and overhanging the first metal portion, a first electrode contacting a portion of the graphene layer and laterally offset from a first sidewall of the first metal portion by a lateral spacing, and a second electrode contacting another portion of the graphene layer and laterally offset from a second sidewall of the first metal portion by the lateral spacing.
申请公布号 US8680512(B2) 申请公布日期 2014.03.25
申请号 US201213614530 申请日期 2012.09.13
申请人 AVOURIS PHAEDON;FARMER DAMON B.;LIN YU-MING;ZHU YU;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 AVOURIS PHAEDON;FARMER DAMON B.;LIN YU-MING;ZHU YU
分类号 H01L29/76 主分类号 H01L29/76
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