| 发明名称 |
Fine tuning highly resistive substrate resistivity and structures thereof |
| 摘要 |
Methods are provided for fine tuning substrate resistivity. The method includes measuring a resistivity of a substrate after an annealing process, and fine tuning a subsequent annealing process to achieve a target resistivity of the substrate. The fine tuning is based on the measured resistivity. |
| 申请公布号 |
US8679863(B2) |
申请公布日期 |
2014.03.25 |
| 申请号 |
US201213420637 |
申请日期 |
2012.03.15 |
| 申请人 |
GAMBINO JEFFREY P.;LIU DERRICK;MARTIN DALE W.;PFEIFFER GERD;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GAMBINO JEFFREY P.;LIU DERRICK;MARTIN DALE W.;PFEIFFER GERD |
| 分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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