发明名称 |
Elevator-based tool loading and buffering system |
摘要 |
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station. |
申请公布号 |
US8678734(B2) |
申请公布日期 |
2014.03.25 |
申请号 |
US20100897440 |
申请日期 |
2010.10.04 |
申请人 |
FRIEDMAN GERALD M.;BUFANO MICHAEL L.;HOFMEISTER CHRISTOPHER;GILCHRIST ULYSSES;FOSNIGHT WILLIAM;BROOKS AUTOMATION, INC. |
发明人 |
FRIEDMAN GERALD M.;BUFANO MICHAEL L.;HOFMEISTER CHRISTOPHER;GILCHRIST ULYSSES;FOSNIGHT WILLIAM |
分类号 |
B65G54/02;B65G54/00;H01L21/67;H01L21/677 |
主分类号 |
B65G54/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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