发明名称 SPACER, SPACER TRANSFERRING METHOD, PROCESSING METHOD AND PROCESSING APPARATUS
摘要 Disclosed is a spacer having at least one protruded part protruding from the circumference thereof. When a spacer is not set onto a predetermined moving-mounting location of a mobile mounting device, the protruding portion moves and rotates the spacer by contacting the mobile mounting device, in order to set the spacer onto the moving-mounting location, while clamping the spacer to the mobile mounting device.
申请公布号 KR20140036113(A) 申请公布日期 2014.03.25
申请号 KR20130107723 申请日期 2013.09.09
申请人 TOKYO ELECTRON LIMITED 发明人 OYAMA KATSUHIKO;TAKEUCHI YASUSHI
分类号 H01L21/677;B65G49/07 主分类号 H01L21/677
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