发明名称 NITRIDE LIGHT EMITTING DEVICE HAVING HIGH LUMINANCE AND METHOD FOR MANUFACTURING OF THE SAME
摘要 <p>Disclosed are a nitride semiconductor device and a method for manufacturing same for obtaining a high-luminance semiconductor device at a low cost by horizontally growing a nitride on a silicon (Si) substrate exposed between mask patterns. A light-emitting device manufacturing method according to an embodiment of the present invention includes the steps of: forming mask patterns having a width of 20-300μm on a silicon substrate; forming a light-emitting structure including a first nitride semiconductor layer, an active layer and a second nitride semiconductor layer by horizontally growing the nitride on the silicon substrate exposed between the mask patterns; forming a trench in a light-emitting structure region between the mask patterns by etching at least the second nitride semiconductor layer and the active layer; attaching a bonding substrate to a surface of the light-emitting structure in which the trench is formed; and removing the silicon substrate and the mask patterns.</p>
申请公布号 KR20140035762(A) 申请公布日期 2014.03.24
申请号 KR20120102459 申请日期 2012.09.14
申请人 ILJIN-LED CO., LTD. 发明人 NORIKATSU.KOIDE
分类号 H01L33/22;H01L33/12 主分类号 H01L33/22
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