| 摘要 |
Disclosed are systems for performing edge ramping and a method thereof. The system includes a basic RF generator for generating a first RF signal. The state of the first RF signal is converted into another state. The conversion of the state of the first RF signal causes a conversion in plasma impedance. The system also includes an auxiliary RF generator for generating a second RF signal. The state of the second RF signal is converted to another one to stabilize the conversion in the plasma impedance. The system includes a controller coupled to the auxiliary RF generator. The controller, if the state of the second RF signal is converted, provides parameter values for the auxiliary RF generator to perform edge ramping of the second RF signal. [Reference numerals] (106) TTL signals; (158) Host computer; (176) Match; (180) Generator parameter set; (AA) y MHz generator; (BB,CC) Set point; (DD) Sensor; (EE) Logic A; (FF) Logic B; (GG) Logic C; (HH) P1: power state 1; (II) P0: power state 0; (JJ) F1: frequency state 1; (KK) F0: frequency state 0; (LL) Time transition TT: xx 쨉S: S1→S2; (MM) Frequency transition FT: F1→F2 tt; (NN) Power transition PT: P1→P2 tt |
