| 摘要 |
The present invention provides a confocal measurement device with high precision. The confocal measurement device (101) comprises: a light source (21) for emitting light having multiple wavelengths; a diffractive lens (1) for making the chromatic aberration of the light received from the light source (21); an objective lens (2) for collecting the light, on which the chromatic aberration is formed, to a measured object (200); and a pin hole (Optical fiber (11)) for penetrating the collected light; and a measuring part (Spectrometer (23) and an image lens (24)) for measuring the strength of the light for each wavelength. The diffractive lens (1) has: a diffractive surface (1a) on which a diffractive pattern for generating the chromatic aberration is formed; and a plane surface (1b) positioned in the other side of the diffractive surface (1a). A circular shielding layer (4) is formed on the plane surface (1b) of the diffractive lens (1) at the center of an optical axis (X) of the diffractive lens (1). [Reference numerals] (25) Control circuit part; (AA) Displacement 123.45 쨉m |
