ATMOSPHERIC PLASMA SINTERING.

摘要

The invention relates to a method for forming a conductive feature, comprising (1) the deposition onto a substrate of an ink comprising a metal, metal oxide or semiconductor material, the ink containing nanoparticles and (2) the sintering of the nanoparticles deposited onto a substrate, characterized in that said sintering is accomplished by subjecting the nanoparticles to plasma at atmospheric pressure. Sintering of nanoparticles by use of a plasma at atmospheric pressure instead of reduced pressure or vacuum expands the scope of such sintering processes.