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发明名称
荷电粒子束描绘装置及其带电效果修正方法
摘要
申请公布号
TWI431655
申请公布日期
2014.03.21
申请号
TW099139403
申请日期
2010.11.16
申请人
纽富来科技股份有限公司 日本
发明人
中山田宪昭;日暮等
分类号
H01J37/317;H01J37/302
主分类号
H01J37/317
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
日本
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