高处理量之热处理系统及操作方法,申请号TW098125825-传众专利搜索

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发明名称	高处理量之热处理系统及操作方法
摘要
申请公布号	TWI431709	申请公布日期	2014.03.21
申请号	TW098125825	申请日期	2009.07.31
申请人	东京威力科创股份有限公司日本	发明人	哈姆林　汤玛士;小拉佛廉　亚瑟;怀曼　贵格瑞
分类号	H01L21/67;H01L21/02	主分类号	H01L21/67
代理机构		代理人	周良谋新竹市东大路1段118号10楼;周良吉新竹市东大路1段118号10楼
主权项
地址	日本

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