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发明名称
改善石墨膜之平坦性之方法、以及石墨膜及其制造方法
摘要
申请公布号
TWI430944
申请公布日期
2014.03.21
申请号
TW100118372
申请日期
2011.05.25
申请人
钟化股份有限公司 日本
发明人
太田雄介;稻田敬;三代真琴;稻田卓;西川泰司
分类号
C01B31/04
主分类号
C01B31/04
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
日本
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