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发明名称
化学增幅正型光阻剂组合物
摘要
申请公布号
TWI431419
申请公布日期
2014.03.21
申请号
TW098126407
申请日期
2009.08.05
申请人
住友化学股份有限公司 日本
发明人
岛田雅彦;桥本和彦;重松淳二;宫川贵行;山本敏
分类号
G03F7/004;G03F7/039;C07C309/12;C07C381/12;C08F20/28;C08F20/38
主分类号
G03F7/004
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
日本
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