发明名称 DEPOSITION APPARATUS
摘要 A deposition apparatus is disclosed. The deposition apparatus forms an organic thin film by depositing deposition particles on a non-deposition base. The deposition apparatus comprises: a chamber in which the non-deposition base is placed inside; an evaporation source disposed opposite to the non-deposition base; and a trim tap which is disposed between the non-deposition base and the evaporation source, comprises a plurality of control boards arranged in a first row and a second row by being divided to the left and right so that the ends thereof are spaced from each other to form an opening, and adjusts the width of the opening by moving the control boards of the first row and the second row facing each other.
申请公布号 KR20140035154(A) 申请公布日期 2014.03.21
申请号 KR20120101663 申请日期 2012.09.13
申请人 SUNIC SYSTEM. LTD. 发明人 LIM, GUN MOOK;LEE, JAE HO;OH, YOUNG MAN
分类号 H01L51/56;C23C14/24;H05B33/10 主分类号 H01L51/56
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