发明名称 |
METHOD FOR PRODUCING LITHIUM-BASED LAYER BY CVD |
摘要 |
A method for forming by CVD a lithium-based layer, according to which the lithium precursor is in liquid form in a mixture containing a solvent and a Lewis base. |
申请公布号 |
KR20140035311(A) |
申请公布日期 |
2014.03.21 |
申请号 |
KR20137013777 |
申请日期 |
2011.12.08 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;ANNEALSYS |
发明人 |
JODIN LUCIE;ACHATZ PHILIPP;DECAMS JEAN MANUEL;DESCHANVRES JEAN LUC;JIMENEZ AREVALO MARIA DEL CARMEN;POULET SYLVAIN |
分类号 |
C23C16/30;C23C16/448 |
主分类号 |
C23C16/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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