| 摘要 |
The present invention relates to a wet/dry composite mask cleaning device for cleaning OLED deposition mask. The present invention comprises: a wet/dry composite mask cleaning device for cleaning using one among plasma, EUV/DUV and UV; a part or whole of OLED deposition mask; a precipitation bath; and a drying device for drying and transferring the OLED deposition mask in the precipitation bath. The arrangement order between the dry cleaning device, precipitation bath and drying device is selectively organized. The OLED deposition mask applies both the drying and wet cleaning method through the dry cleaning device, precipitation bath and drying device, so that organic evaporation material cleaning can be performed through dry plasma cleaning. Through the dry cleaning method, most of the organic evaporation materials can be cleaned, and the rest of the organic evaporation materials can be treated by precipitating the same in a cleaning solution so that the cleaning solution causing chemical reaction can be reduced. The productivity can be improved by reducing the time required for cleaning masks. Considering the fact that the convention method using a cleaning solution, ultrasonic waves and electrocleaning is not enough to completely clean, the mask cleaning device using both the wet and dry methods can completely clean. |
