| 摘要 |
An evaporation source and an evaporating apparatus comprising the same are disclosed. The evaporation source comprises: a crucible, in which the upper part is opened, which receives evaporation materials and ejects vaporized particles by vaporizing the evaporation materials depending on heating; a nozzle unit which contains a moving tube in which the bottom part is coupled with the upper part to communicate with the crucible and a distribution pipe which is coupled to the upper part of the moving tube in a lateral direction to communicate with the moving tube and in which a spraying nozzle is formed longitudinally on the upper part and a sensing nozzle is formed on the outside of the spraying nozzle; and a leading partition which divides the moving tube in the longitudinal direction and is formed on the nozzle unit to lead a portion of the vaporized particles to the sensing nozzle. The present invention is to accurately measure an amount of vaporized particles ejected from the evaporation source. |
