发明名称 DIE BONDER AND BONDING METHOD
摘要 The present invention relates to a bonding device with high operation ratio and a bonding method. The present invention inserts a collet holder, which is holding a used collet, from a first opening part wherein the surface of the first opening part is opened; combines the used collet with a first combination part mounted at the first opening part of a disposal part; removes and disposes the used collet from the collet holder by elevating the collet holder; inserts the collet holder from a second opening part of a supplying part wherein the surface of the first opening part is opened; holds the unused collet of the uppermost part of the overlapped multiple unused collets and purges from the first opening part; and mounts the unused collet of the uppermost part at the collet holder.
申请公布号 KR20140035232(A) 申请公布日期 2014.03.21
申请号 KR20130020475 申请日期 2013.02.26
申请人 HITACHI HIGH-TECH INSTRUMENT CO., LTD. 发明人 TAKANO RYUICHI;OKAMOTO NAOKI
分类号 H01L21/52 主分类号 H01L21/52
代理机构 代理人
主权项
地址