发明名称 |
DIE BONDER AND BONDING METHOD |
摘要 |
The present invention relates to a bonding device with high operation ratio and a bonding method. The present invention inserts a collet holder, which is holding a used collet, from a first opening part wherein the surface of the first opening part is opened; combines the used collet with a first combination part mounted at the first opening part of a disposal part; removes and disposes the used collet from the collet holder by elevating the collet holder; inserts the collet holder from a second opening part of a supplying part wherein the surface of the first opening part is opened; holds the unused collet of the uppermost part of the overlapped multiple unused collets and purges from the first opening part; and mounts the unused collet of the uppermost part at the collet holder. |
申请公布号 |
KR20140035232(A) |
申请公布日期 |
2014.03.21 |
申请号 |
KR20130020475 |
申请日期 |
2013.02.26 |
申请人 |
HITACHI HIGH-TECH INSTRUMENT CO., LTD. |
发明人 |
TAKANO RYUICHI;OKAMOTO NAOKI |
分类号 |
H01L21/52 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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