| 摘要 |
According to one embodiment of the present invention, a slit valve includes a valve chamber combined with one side of a process chamber having a slit for entering a substrate, a slit opening/closing unit moving up and down in the valve chamber and selectively opening/closing the slit, and a valve ground unit grounding the slit opening/closing unit to the valve chamber. The valve ground unit includes a first conduction part which is prepared in one of the slit opening/closing unit and the valve chamber, and a second conduction part which is prepared in one of the slit opening/closing unit and the valve chamber to touch the first conduction part and maintains the contact of the first conduction part when the slit opening/closing unit relatively moves with respect to the valve chamber. |
