| 摘要 |
The present invention relates to a method for manufacturing tungsten hexafluoride, which comprises 1) a step of obtaining a tungsten metal containing less than 500 ppm of oxygen by removing oxygen from an oxygen-containing raw tungsten metal that makes contact with fluorine, nitrogen trifluoride, or a mixture thereof as much as 5 to 10 times by weight of oxygen contained in the raw tungsten metal; and 2) a step of manufacturing tungsten hexafluoride by reacting the tungsten metal containing less than 500 ppm of oxygen obtained from step 1) with fluorine, nitrogen trifluoride, or the mixture thereof. According to the method of the present invention, an operation does not have to be stopped or a device cleaning is not required in an event of clogging of a pipe or the device during operation, thereby enabling operations at a high rate of operation. |
