| 摘要 |
PROBLEM TO BE SOLVED: To obtain a capacitor which has less power loss and does not require large area.SOLUTION: By employing a metal distribution line to distribution lines having a line-and-space structure and utilizing capacity produced between the adjacent metal distribution lines, a capacitor having less parasitic resistance and small area is obtained. The line-and-space structure 4 is formed in a manner such that a plurality of distribution lines 3 which extend in an x direction and composed of metal such as Al and Cu are arranged in parallel with each other in a y direction at predetermined intervals. Three or more line-and-space structures 4 are formed in a z direction in a layered manner. Flat electrodes 7a, 7b are arranged so as to be lined up in the z direction with respect to the line-and-space structures 4 via an insulation film 2. |
