发明名称 |
SPACER, SPACER TRANSFERRING METHOD, PROCESSING METHOD AND PROCESSING APPARATUS |
摘要 |
According to an embodiment of present disclosure, a spacer is provided. The spacer includes at least a protrusion formed to protrude from an outer periphery of the spacer. The protrusion serves to locate the spacer in place in a transfer mechanism configured to transfer the spacer when the spacer is fixed by the transfer mechanism in such a way that the protrusion comes in contact with the transfer mechanism, and configured to allow the spacer to rotate or move in case the spacer is deviated from a predetermined transfer position when the spacer is engaged with the transfer mechanism. |
申请公布号 |
US2014079526(A1) |
申请公布日期 |
2014.03.20 |
申请号 |
US201314025899 |
申请日期 |
2013.09.13 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
OYAMA KATSUHIKO;TAKEUCHI YASUSHI |
分类号 |
H01L21/677;H01L21/673 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|