PROCESS OF MANUFACTURING MAGNETORESISTIVE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a process of manufacturing a magnetoresistive element such as an MRAM using a magnetoresistive effect,the process enabling degradation in the device properties to be suppressed within an allowable range.SOLUTION: The process of manufacturing a magnetoresistive element includes: depositing a first magnetic material film; plasma-etching the first magnetic material film using a mask patterned in advance; and sequentially depositing a barrier layer above the plasma-etched first magnetic material film and a second magnetic material film that sandwiches the barrier layer between the plasma-etched first magnetic material film and the second magnetic material film.