发明名称 TREATMENT APPARATUS, METHOD FOR MANUFACTURING TREATMENT LIQUID, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
摘要 According to one embodiment, a treatment apparatus includes an electrolysis unit, an alkali addition unit, and a treatment unit. The electrolysis unit includes an anode electrode and a cathode electrode. The electrolysis unit is configured to electrolyze a solution containing an alkali containing no metal, hydrochloric acid, and water. The alkali addition unit is configured to further add the alkali containing no metal to a solution that has undergone the electrolysis. The treatment unit is configured to perform treatment of an object to be treated using a solution that has undergone the electrolysis and in which the alkali containing no metal is further added.
申请公布号 US2014076355(A1) 申请公布日期 2014.03.20
申请号 US201313968672 申请日期 2013.08.16
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HIRABAYASHI HIDEAKI;NAGASHIMA YUJI;HIRAKAWA MASAAKI
分类号 H01L21/02 主分类号 H01L21/02
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