发明名称 MANUFACTURING METHOD OF ORGANIC EL ELEMENT
摘要 A method of manufacturing an organic EL element having a pair of electrodes and an organic functional layer disposed therebetween, the pair of electrodes consisting of an upper electrode and a lower electrode, comprising: forming the upper electrode on the organic functional layer by a magnetron sputtering method with a film-forming power density no less than 4.5 W/cm2 and no greater than 9.0 W/cm2.
申请公布号 US2014080241(A1) 申请公布日期 2014.03.20
申请号 US201214009367 申请日期 2012.11.06
申请人 PANASONIC CORPORATION 发明人 AONUMA MASAKI
分类号 H01L51/56 主分类号 H01L51/56
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