THERMAL TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To inhibit adhesion of foreign objects in a housing container which houses a processed object in a thermal treatment apparatus.SOLUTION: A thermal treatment apparatus 1 includes: a tube 2; and a protective cylinder 2. The tube 2 is provided so as to house a processed object 100. The tube 2 has a second facing part 97. The second facing part 97 is disposed so as to be subject to a gas for performing thermal treatment on the processed object 100 and faces an inner peripheral surface 11b of an opening 11 of the tube 2. Heat conductivity HC7 of the protective cylinder 7 is set so as to be larger than heat conductivity HC2 of the tube 2 (HC7>HC2).