发明名称 Storage Element for STT MRAM Applications
摘要 An improved PMA STT MTJ storage element, and a method for forming it, are described. By inserting a suitable oxide layer between the storage and cap layers, improved PMA properties are obtained, increasing the potential for a larger Eb/kT thermal factor as well as a larger MR. Another important advantage is better compatibility with high processing temperatures, potentially facilitating integration with CMOS.
申请公布号 US2014077318(A1) 申请公布日期 2014.03.20
申请号 US201213617432 申请日期 2012.09.14
申请人 KULA WITOLD;JAN GUENOLE;TONG RU-YING;WANG YU-JEN;HEADWAY TECHNOLOGIES, INC. 发明人 KULA WITOLD;JAN GUENOLE;TONG RU-YING;WANG YU-JEN
分类号 H01L29/82;H01L21/02 主分类号 H01L29/82
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