| 摘要 |
PROBLEM TO BE SOLVED: To provide a spray type coating apparatus capable of suppressing the degree of freedom of a formation pattern of an organic EL material-containing liquid film from being restricted by a mask part.SOLUTION: A spray type coating apparatus includes: a spray unit having a spray nozzle supplying a material; a movement mechanism relatively moving the spray nozzle and a substrate on a plate part; a voltage part applying a voltage between the plate part and the spray nozzle; and a mask part disposed between the substrate and the spray nozzle. In the spray type coating apparatus, the material is sprayed through the spray nozzle while the substrate and the spray nozzle are relatively moved, in a state where a voltage is applied between the plate part and the spray nozzle, and thereby the material is attached on the substrate through an opening of the mask part. The mask part is provided being fixed to the spray nozzle. The mask part is configured to move so that a physical relationship between the spray nozzle and the opening of the mask part is maintained at constant. |
