发明名称 |
MEASURING APPARATUS AND MEASURING METHOD, AND ELEMENT MANUFACTURING METHOD INCLUDING MEASURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus and a measuring method in which the contact portion of an electrode and a probe can be covered with an insulating solution surely, and to provide a manufacturing method using the measuring apparatus.SOLUTION: A measuring apparatus includes a probe 1 for applying a voltage to the electrode of an element, and a supply member 2 for supplying an insulating solution 20 to the contact portion 10C of the electrode and the probe 1 via the surface of the probe 1. Consequently, the insulating solution 20 can be supplied surely to the contact portion 10C of the electrode and the probe 1 via the surface of the probe 1 positioned for the electrode. |
申请公布号 |
JP2014053454(A) |
申请公布日期 |
2014.03.20 |
申请号 |
JP20120196977 |
申请日期 |
2012.09.07 |
申请人 |
SUMITOMO ELECTRIC IND LTD |
发明人 |
SAKAI MITSUHIKO;MASUDA TAKEYOSHI;HIRATSUKA KENJI |
分类号 |
H01L21/66;G01R31/26 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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