发明名称 MEASURING APPARATUS AND MEASURING METHOD, AND ELEMENT MANUFACTURING METHOD INCLUDING MEASURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a measuring apparatus and a measuring method in which the contact portion of an electrode and a probe can be covered with an insulating solution surely, and to provide a manufacturing method using the measuring apparatus.SOLUTION: A measuring apparatus includes a probe 1 for applying a voltage to the electrode of an element, and a supply member 2 for supplying an insulating solution 20 to the contact portion 10C of the electrode and the probe 1 via the surface of the probe 1. Consequently, the insulating solution 20 can be supplied surely to the contact portion 10C of the electrode and the probe 1 via the surface of the probe 1 positioned for the electrode.
申请公布号 JP2014053454(A) 申请公布日期 2014.03.20
申请号 JP20120196977 申请日期 2012.09.07
申请人 SUMITOMO ELECTRIC IND LTD 发明人 SAKAI MITSUHIKO;MASUDA TAKEYOSHI;HIRATSUKA KENJI
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
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