| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method by which usage of a cleaning solution and gas can be reduced, while the cleaning capability is maintained.SOLUTION: A cleaning solution stored in a storage tank 12 is pressurized to a pressure equal to or higher than an atmospheric pressure by a pressurization pump 14, and also is heated to a temperature equal to or higher than a boiling point of the cleaning solution in the atmospheric pressure by a heat exchanging part 16, and is put into a pressurized and overheated condition as a result. A nozzle block 30 jets the cleaning solution in the pressurized and overheated condition along with air supplied by a compressor 22 to a member 24 to be cleaned. The jetted cleaning solution is phase-changed to a cleaning vapor, and then a portion of the cleaning vapor changes into the cleaning solution in a liquid drop state. When the cleaning vapor, the cleaning solution in the liquid drop state and air are made to collide with the member 24 to be cleaned, the stain and chemical deposited on the surface are removed. Thereby, the cleaning vapor and cleaning solution of the liquid drop state effective for cleaning can be generated without using a large quantity of air. As a result, the usage of the cleaning solution and air can be reduced while maintaining cleaning capability. |
