CHARGED PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION METHOD

摘要

Any of conventional charged particle beam devices are manufactured as a device dedicated to observation under atmospheric pressure or under a gas atmosphere of a pressure substantially the same as atmospheric pressure, and no device existed for simply performing observation under atmospheric pressure or under a gas atmosphere of a pressure substantially the same as atmospheric pressure by using a standard high vacuum charged particle microscope. Further, in conventional methods there is a problem in which there is a high possibility of damaging the diaphragm due to lack of a method for controlling the distance between a diaphragm and a sample. Consequently, the present invention is characterized by being provided with the following: a removable diaphragm that isolates a space in which a sample is mounted so that the pressure of the space in which the sample is mounted is maintained at a greater pressure than that inside an enclosure, and that causes a primary charged particle beam to be transmitted or passed; a contact prevention member for preventing contact between the sample and the diaphragm; and an adjustment mechanism that enables at least a portion of the contact prevention member to be moved in the light axis direction of a charged particle optical lens barrel.