| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized and high-sensitivity pressure detection element.SOLUTION: The pressure detection element includes: a support substrate having a thin film area which bends due to pressure; a sensor film including a first electrode provided on the thin film area, a second electrode provided on the first electrode, a reference layer provided between the first electrode and the second electrode, a magnetization free layer which is provided between the reference layer and the first electrode or between the reference layer and the second electrode and changes magnetization due to bending of the thin film area, and a spacer layer provided between the reference layer and the magnetization free layer; and a shield which is provided on a surface of the support substrate where the sensor film exists, and comprises a soft magnetic material. |
