| 摘要 |
An object of the invention is to provide a carbon film laminate having a sliding surface with low friction, low abrasion, and low counterpart aggressiveness using high adhesiveness to a base material, hardness, surface flatness, low counterpart aggressiveness, transparency, and high thermal conductivity which are provided to the carbon film without using liquid and semiliquid lubricants such as lubricating oil. Provided is a carbon film laminate including a base material, a carbon film adhesion reinforcing layer which is provided on the base material and which is formed from silicon oxide (SiOx, x=1 to 2) containing fluorine atoms (F) in a concentration of 1�1019 atoms/cm3 or more, and a carbon film that is formed on the carbon film adhesion reinforcing layer. The carbon film contains fluorine atoms in the film in a concentration of 1�1019 to 1�1021 atoms/cm3, and has an approximate spectrum curve obtained by superimposing, on a peak fitting curve A at a Bragg angle (2θ�0.5�) of 43.9� in an X-ray diffraction spectrum by CuKα1 rays, a peak fitting curve B at 41.7� and a baseline. |
