DEVICE FOR DETECTING ION BEAM PROFILE DENSITY DISTRIBUTION AND ION BEAM UNIFORMITY DISTRIBUTION IN REAL TIME

摘要

Disclosed is an array type combined Faraday cup capable of detecting the beam spot profile density distribution of an ion beam flow under the focusing condition and the beam uniformity distribution thereof under the scanning condition, including: a two-dimensional Faraday cup array (2) in the centre position, and a one-dimensional Faraday cup array (4) in each of the two side positions. It is characterized in that: the two-dimensional Faraday cup array (2) in the centre position is used for detecting the density distribution of a beam spot profile of an ion beam under the focusing condition (5); and the one-dimensional Faraday cup arrays (4) in the two side positions are used for detecting the beam uniformity distribution of the ion beam under the scanning condition (6). This device can detect the distribution and state change of an ion beam in real time, improving the detection timeliness and precision.