| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample observation method capable of easily making the visual field in a search mode and the visual field in a photo mode correspond to each other.SOLUTION: A sample observation method includes: a step of setting a first condition of an irradiation lens system and an image forming lens system in a photo mode; a step of setting a second condition of the irradiation lens system and the image forming lens system in a search mode; and a step in which, based on the first condition and the second condition, a control part controls the irradiation lens system and the image forming lens system so that an electron microscope image having a magnification between the magnification in the search mode and the magnification in the photo mode is acquired. |
