发明名称 MOULD WASHING EQUIPMENT, AND MOULD WASHING METHOD
摘要 PROBLEM TO BE SOLVED: To provide mould washing equipment and mould washing method preventing damage and defect of pattern.SOLUTION: Mould washing equipment comprises: a holding unit; a medium supply unit; an energy supply unit; and an energy control unit. The holding unit holds a mould having at least a dent pattern provided with a first face of a base material with the first face downside. The medium supply unit supplies medium to the dent pattern. The energy supply unit supplies energy for the mould from the other side with the first face of the base material. The energy control unit controls an amount of the energy arriving at the dent pattern.
申请公布号 JP2014051051(A) 申请公布日期 2014.03.20
申请号 JP20120197808 申请日期 2012.09.07
申请人 TOSHIBA CORP 发明人 OTA TAKUMI
分类号 B29C33/72;H01L21/027 主分类号 B29C33/72
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