A gas flow sensing device, and related method of manufacturing, comprising a conductive layer encapsulated in dielectric film, suspended over a cavity to form a diaphragm. The conductive layer functions as both a heating a sensing element and is patterned to provide uniform heat distribution across the diaphragm. The device is designed to sense flow from any direction relative to the device and the design of the dielectric film and diaphragm reduces sensor drift during prolonged operation.
申请公布号
WO2014011277(A3)
申请公布日期
2014.03.20
申请号
WO2013US36109
申请日期
2013.04.11
申请人
UNIVERSITY OF VIRGINIA PATENT FOUNDATION;ZHU, JIANZHONG;BART-SMITH, HILARY;CHEN, ZHENG