发明名称 |
APPARATUS FOR CONTROLLING TENSION OF DIAPHRAGM |
摘要 |
The present invention discloses an apparatus for controlling the tension of a diaphragm. The disclosed invention comprises: a fixing part fixing the diaphragm installed in a chamber; and a control part controlling the deposition of the fixing part to control the tension of the diaphragm installed in the chamber. The present invention can reduce the number of people, man hours, and working time needed for controlling the tension of the diaphragm. |
申请公布号 |
KR20140034358(A) |
申请公布日期 |
2014.03.20 |
申请号 |
KR20120099704 |
申请日期 |
2012.09.10 |
申请人 |
ZEUS CO., LTD. |
发明人 |
LEE, BYEONG SU;MUN, SUNG IL;LEE, KYUNG JU |
分类号 |
H01L31/18;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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