发明名称 APPARATUS FOR CONTROLLING TENSION OF DIAPHRAGM
摘要 The present invention discloses an apparatus for controlling the tension of a diaphragm. The disclosed invention comprises: a fixing part fixing the diaphragm installed in a chamber; and a control part controlling the deposition of the fixing part to control the tension of the diaphragm installed in the chamber. The present invention can reduce the number of people, man hours, and working time needed for controlling the tension of the diaphragm.
申请公布号 KR20140034358(A) 申请公布日期 2014.03.20
申请号 KR20120099704 申请日期 2012.09.10
申请人 ZEUS CO., LTD. 发明人 LEE, BYEONG SU;MUN, SUNG IL;LEE, KYUNG JU
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
代理机构 代理人
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