| 摘要 |
PROBLEM TO BE SOLVED: To enable the examination of an object by using particles that have low energy, with good imaging properties.SOLUTION: The present invention relates to a particle beam device (1) and to a method for operating the particle beam device (1), in particular an electron beam device, having a beam generator (2) for generating a primary particle beam, having an objective lens (8) for focusing the primary particle beam onto an object (15), and having a detector (17) for detecting particles emitted by the object (15). The objective lens (8) has at least one magnetic unit (11, 12), the magnetic unit (11, 12) generating at least one first crossover (C1, C1') and at least one second crossover (C2). The first crossover (C1, C1') is arranged in the objective lens (8) or in a region between the objective lens (8) and the object (15). The second crossover (C2) is arranged at the object (15). |
