发明名称 |
SUBSTRATE CLEANING APPARATUS |
摘要 |
A substrate cleaning apparatus is provided. The substrate cleaning apparatus includes a plurality of transfer rollers for transferring a substrate; a liquid chemical feeder supplying a liquid chemical to a first surface of the substrate; wherein the liquid chemical feeder comprises a first housing and a first cleaning roller rotatably installed within the housing and having an upper portion configured to contact with the substrate. |
申请公布号 |
US2014075690(A1) |
申请公布日期 |
2014.03.20 |
申请号 |
US201313963743 |
申请日期 |
2013.08.09 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
LEE SEUNG-JUN;YOU JUNG-HWA;HAHN SOHRA;SHIN DONG-MYUNG |
分类号 |
B08B1/02;B08B1/00;B08B1/04;B08B3/04 |
主分类号 |
B08B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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